CMI 760配置包括:
CMI700主机及证书
SRP-4面铜探头
SRP-4探头替换用探针(1个)
NIST的校验用SRP标准片及证书
ETP孔铜探头
NIST的校验用ETP标准片及证书SRP-4面铜探头测试技术参数:
铜厚测量范围:
化学铜:0.25μm - 12.7μm(10μin - 500μin)
电镀铜:2.5μm - 254μm(0.1mils - 10mils)
线性铜线宽范围:203μm - 7620μm(8mil - 300mil)
准确度:±1%(±1μm)参考标准片
度:化学铜:标准差0.2%,电镀铜:标准差0.3%
分辨率:0.1μm≥10μm,0.01μm<10μm,0.001μm<1μm,0.01mils≥1mil,0.001mils<1milETP孔铜探头测试技术参数:
可测孔小直径:Φ0.899m(35mils)
孔径范围:0.899m - 3.0m
厚度范围:2μm - 102μm(0.08 - 4.0mils)
准确度:±0.01mils(0.25μm)<1mil(25μm)
度:1.2milS时,1%(实验室情况下)
分辨率:0.01mils(0.25μm)