mks 1559A质量流量计（控制器）

产品品牌：

美国mks

产品型号：

1559A

1559A质量流量控制器（大流量，常闭阀）

1559 是一种通用型弹性密封的质量流量控制器，可在20slm（42.5cfh）到200slm（425cfh）量程范围进行气体的质量流量控制。相比于其它的 大流量控制器，1559独有的控制阀门能够消除振荡、具有更好的响应时间。它的这个特点是通过使用一“平衡力”阀门的设计来实现的，它能够消除管道压力引 起控制阀门内部的非平衡状态。1559的为全量程的±1％。                                                                                                          例：型号1559A00421LS1BV                                        采购序列号         校准气体（SEMI气体编号）*Helium, He                                                         001Argon, Ar                                                           004Hydrogen, H2                                                      007Nitrogen, N2                                                         013Oxygen, O2                                                         015      **校准流量SLM－sccm（相当氮气200SLM）20                                                                                                             021L                    50                                                                                                             051L                    100                                                                                                           12L               200                                                                                                           22L                       装配件（Y）标配：Swagelok 0.5英寸管                                                               S                         选配：Swagelok^R8VCR^R凸接头                                                           R                         选配：Swagelok^R8VCO^R凸接头                                                           G                          阀常闭                                                            1 电气/通讯连接器模拟15针D                                                     B 密封（Z）标配:Viton^R                                                                                             V                         选配: Neoprene^R                                                                                       N                         选配: Buna N                                                                                            B                         选配: Kalrez^R                                                                                            K                              型号1559A（续）  用于1559A的电缆线CB259-5-10用来将1559连接至PR4000, 246, 247                                            （如要在247上连接2个以上的通道，需要添加一个电源，请用CB1559-1-10）         CB147-1-10用来将1559连接至146, 186, 647, 167                             CB1559-1-M1用来连接1559A、247D和260PS