| 类型 | 质量流量计 | 测量范围 | 3-750SCCM（m3/h） |
| 等级 | 2％ |
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Unit 8160 Series Specifications-特点
Materials
Pre-Filter 1 to 2 μm
Gas Path SEMI F20 Compliant
Surface Finish 4 μ inch Ra
Seals Metal
Weight <2.65 lbs (1.2 kg)
Electrical
Current/Voltage (D/A) 160mA max @ +15 VDC and 200mA max @ –15 VDC
Power (D/A) 5.0 watts max
Current/Voltage (DNet) 600 mA @ 12 VDC and 300 mA @ 24 VDC
Power (DNet) 7.2 watts max
Certifications EMC 89/336 EEC
Performance SC10-SC14 SC15-SC16 SC17-SC18
Settling Time： ≤1 sec ≤1 sec ≤1 sec
Flow Range： 3–750 sccm 751–6000 sccm 6001–30000 sccm
Differential Pressure：7 to 45 psid 10 to 45 psid 15 to 45 psid
Accuracy (Model 8161, 8165)
2% Valve Shut-off Valve Shut-off Valve Shut-off
2% to 5% Not Specified Not Specified Not Specified
5% to 35% ±0.35% F.S. ±0.35% F.S. ±0.35% F.S.
35% to 100% ±1.0% S.P. ±1.0% S.P. ±1.0% S.P.
Accuracy (Model 8160) ±1.0% F.S.
Repeatability ±0.15% F.S.
Linearity ±0.5% F.S.
Ambient Temperature Coefficient
Zero 0.005% F.S. per °C
Span 0.1% F.S. per °C
Leak Integrity 1x10–10atm-cc/sec (He)
Zero Drift 0.6% F.S. per year
Valve Leakby Rate 1% F.S.
Proof Pressure 500 psia max
Burst Pressure 1500 psia max
Valve Configuration Normally Closed or Normally Open
Temperature Range 10°C–50°C
Warm Up Time 30 minutes
Mounting Position HOV or HOS
