微机械激光光束偏转器

微机械激光光束偏转器的特点：本产品为基于微光机电的微机械激光光束偏转器（MEMS laser deflection mirror），微光机电激光光束扫描器， 也成为MEMS激光光束扫描镜。广泛应用于数据采集，投影以及其它各种应用场合。微机械光束扫描镜可提供小尺寸，大扫描角度，高扫描频率的产品，适用于各种小体积的产品中。本品为单个微机械激光光束扫描偏转镜，另外本系列产品还包含有1D微机械激光光束偏转器（一维微光机电激光光束扫描偏转器）及2D微机械激光光束偏转器（二维微光机电激光扫描偏转器）。

Micro mechanical scanning mirrors offer a high degree of miniaturization, high scan frequencies, high mechanical robustness and the potential for low cost manufacturing at high volumes. MEMS scanners are very promising especially for all and portable systems.

本微机械激光光束偏转器（微光机电激光光束扫描偏转镜）指标如下：
MEMS Scanner
Scanner te                                     Electrostatic resonant 1D
Scanning frequency                            500 Hz … 50 kHz （≥ 200 Hz on request）
Optical scan angle （FOV）                     Depending on scanner, optical scan angle up to 80°
                                                       （mechanical scan angle  &plun;20°） supported
Active mirror diameter                         1 … 4 mm
Active mirror surface                           Aluminum, reflectivity 88 ... 90% in visible
wavelength range                              （400 … 700 nm）

Scan Head
Substrates with available technologies    Ceramic （standard）, gl or PCB on request
Sealing                                              Dust-proof
Optical interface                                 Dome with anti-reflective coating;
                                                        option: plane window on request
Mirror position control                          Optical, integrated in scan head, signal processing on driving electronics board
Electrical interface                               Flexible flat cable connected to sensor system
Module footprint                                 16 × 23 mm²
Working temperature                          0 … 45 °C （extended temperature range on request）

Driving Electronics Board
Dimensions                                         77 × 46 mm²
Supply voltage                                    5 V DC
Internally generated driving
voltage for scanner                             15 V … 200 V, max. 3 mA
Operating modes of thescanner control  amplitude-controlled （above 8° scanning angle） or voltage-controlled