我公司代理美国Torr公司，高质量PVD系统，产品系列包括热蒸发系统，
电子束蒸发系统E-beam，磁控溅射系统sputtering，反应离子刻蚀RIE, ICP
刻蚀机， 离子束刻蚀系统IBE，脉冲激光沉积系统PLD，等离子增强气相沉
积系统PECVD，除了标准的系统之外，我们还可以按照客户要求量身定制，
满足不同客户的苛刻要求。可提供电子束与热蒸发及磁控溅射联合系统，
完成多功能苛刻要求的应用。
COMPONENT | OPTIONS |
Chamber | Choose Stainless Steel or Quartz, Cylindrical with Opening Lid or Box Shaped with Full Opening Front Door, Number, Size & Location of Viewports, Single or Multiple Chambers [Load Lock] |
Gas Delivery | Choose Multiple M Flow Controllers, Gas Controllers, Custom Gas Showers, Independent N2 Venting Systems, Corrosive and|or Non-Corrosive Ges, Lines & Valves |
Electron Beam System | Choose Single or Multiple Pockets, Crucible Capacity, High Voltage Power Supply, XY Sweep Controller with Adjustable Variable Sweep Pattern |
Magnetron Sputtering System | Choose Single or Multiple Guns, Gun Size, Adjustable, Retractable or Fixed Mounting, RF and|or DC Power Supplies, Automatic or Manual Matching Network |
Resistive Thermal System | Choose Single or Multiple Sources, Boats, Baskets & Coils, Independent Variable Power Supply |
Ion Mill Source | Choose Beam Diameter, Power Source, Gas Delivery System |
Etching System | Choose DC and|or RF Power Supplies, Gas Deliver System |
Substrate Stage | Choose Stage Diameter, Stage Rotation and|or Tilt, Mask Holders, Stage Heating and|or Cooling |
Thickness Sensors & Monitors | Choose Te of Thickness Sensor, Deposition Rate Controller, Manual or Automatic Process Control |
Additional Options | Compact Table or Stand Alone Cabinet Systems, Manual or Automatic Controls, Individual Component Cooling Systems, Sheilds & Shutters, Chamber Liners, Renewable Extended Warranties and Much More! |
If you are not sure exactly what options your system or your process requires, our staff will help you design the system that is right for your needs and that will fit your budget. | |
