VisiTec Microtechnik(德国)
VisiTec Microtechnik
德国VisiTecMicrotechnik www.visitec-em.de德国Visitec捷高公司的超大试样室Mira型扫描电镜。•被检物的尺寸可为直径700mm,高600mm,长1400mm,重量可达300公斤,真空室长1400,宽1100和高1200mm。•分辨本领4nm,加速电压0.3kV—20kV。•是一种新的计算机控制、非破坏性的检查分析测
试装置,可用于工业产品的生产,质量管理,微机加工和工艺品的检查研究等。VisiTecMicrotechnikGmbHisaninnovativemedium-sizedenterprise.ItsmainpurposeistodevelopandproduceMIRA,theLargeChamberScanningElectronMicroscopes(LC-SEM).Astheworld’slargestoneofitskind,itisusedinvariouscasessinceitwaspresentedin1995.MoreoverVisiTecspecializesinvacuumtechnologyandinnon-destructiveanalysis.Variousdetectorsareavailablefordifferentneeds.InparticulartheFIBandtheFTIRofferaveryaccurateanalysisofsurfaces,eveninmoleculardimensions.Mostly,theLC-SEMisusuallyappliedinResearchandDevelopment.HistoryThecompanywasfoundedbydirectorMartinKleinin1994inGrevesmu