PVD(美国)

PVD Products

美国PVDProductswww.pvdproducts.com美国PVD公司为客户提供优质的薄膜沉积设备，特别是大面积脉冲激光沉积(PLD)系统，还包括沉积元件如靶材操纵器和智能视窗等，另外可为客户订制激光分子束外延设备(L-MBE)。Dr.JamesA.GreerfoundedPVDProductsin1995todevelopandselllarge-areaPulsedLaserDepos itionsystems.InhispreviousjobatRaytheon’sResearchDivision,Dr.GreerdevelopedprototypeequipmentwithabilitytoscalethePLDprocessupto200mminsize.Soonafterward,Dr.GreerwonaPhaseIISBIRfromWrightPattersonAirForceBasetodevelopaPLDsystemtohandleupto5-inchdiametersubstrates.ThismachinewasspecificallydesignedtogrowHTSmaterialsandithasbeenusedtogrowhighqualityYBCOandothermaterialsonsubstratesupto125mm(5-inch)indiameter.TheoutcomeofthisSBIRwasthePLD5000system.In1996PVDProductswasmergedintoEpionCorporation.WhileatEpion,Dr.Greercontinuedtodevelopandselllarge-areaPLDsystemsaswellasotherthinfilmprocessingtoolsincludingGasCl