1、型号：Verifire MST 货号：21011301
Interferometer System for Multiple Surface Testing
Verifire MST laser interferometer enables precise optical metrology of multiple surfaces simultaneously, including plane parallel components with multiple reflections.
The Verifire MST starts with the clical interferometer applications.
These applications all measure the wavefront variations between two surfaces, a two-surface cavity.
However, measuring an uncoated parallel plate gives two layered interferograms (a three-surface cavity) that confuse standard Phase Shift Interferometry algorithms.
ZYGO has solved this problem using wavelength shifting of phase, and ZYGO's patented Fourier Transform Phase Shifting Interferometry (FTPSI).
The Verifire MST can measure two-surface, three- and even four-surface cavities.
Show all of the surfaces, or only the surfaces of interest, all within ZYGO's Mx software. Artifacts are naturally suppressed using FTPSI, eliminating the need for an extended source.
2、型号：Verifire XL 货号：21022401
Large-Aperture Downward-Looking
Interferometer Workstation
The Verifire XL interferometer is a stand-alone workstation designed for simplistic and reliable metrology of large flat surfaces up to twelve inches (300 mm) in diameter. Examples include front-surface reflectors, windows, and semiconductor wafers or wafer chucks.
This fully integrated system is easy to use, with a heavy duty tip/tilt stage that provides repeatable part placement without the need for custom fixturing. The compact footprint, with built-in vibration isolation, requires minimal production floor space.
Vibration Robust
The Verifire XL system includes ZYGO's patented QPSI acquisition technology which enables reliable high-precision measurements in the presence of vibration. QPSI enables true on-axis surface form metrology, without degradation from tical production vibrations.
Accurate Metrology
The high-performance tranission flat in the Verifire XL system is designed for minimal sensitivity to gravitational sag, and includes a full-area calibration file to enable optimum system accuracy.
3、型号：ZeGage Plus 货号：21031601
3D Optical Surface Profiler with Sub-Nanometer Precision
The ZeGage Plus optical profiler expands on the capabilities of the ZeGage profiler with higher precision, faster measurement speed, and an increased range of measurable surfaces–while preserving its ease of use, vibration insensitivity, and all footprint.
The ZeGage Plus profiler can measure a wider variety of surfaces–ranging from very rough to ooth, with sub-nanometer precision, independent of field of view. Surface finishes may include ground, honed, lapped, polished, and -polished on materials such as gl, ceramic, and metal.
For high-speed form measurements, the ZeGage Plus scans up to twice as fast as the ZeGage , providing faster time-to-data and increased throughput for production metrology.
As with the ZeGage profiler, the interactive control software, Mx , provides easy and detailed visualization to help you control your process. Read more to see how the power, versatility, and value of the ZeGage Plus profiler can benefit you.
4、菲索型激光干涉仪
型号：BZY4-Verifire 货号：21041901
菲索型激光干涉仪，具有QPSI测量模式，能够在振 动环境中检测，真正的共光路面形计量干涉仪。
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